Interpretation of the special plan for the "Eleventh Five-Year Plan" for electronic special equipment and instruments

The electronic special equipment and instrument industry is an important branch of the equipment manufacturing industry. It is a highly integrated production technology and process technology of electronic information products. It is at the highest end of the electronic information industry chain, with strong foundation and high correlation. It is the most technically difficult and complex. The value-added and the highest entry barriers determine the overall level of electronic information products manufacturing in a country or region, and are also an important indicator of the comprehensive strength of the electronic information industry.

After nearly 30 years of reform and opening up, especially since the rapid development of the 10th Five-Year Plan, China has become the world's most important electronic information product production base. The industrial scale is in the forefront of the world, and the huge processing and manufacturing capacity undoubtedly accelerates us. The development of the electronic equipment and instrument industry has created a favorable market environment. At the same time, after years of development, China's digital control, precision processing, microelectronics, communications, new components, new materials, test and measurement and other related industries and technologies have made great progress. Therefore, during the “Eleventh Five-Year Plan” period, relying on the domestic market and the existing industrial base, it is entirely possible to make breakthroughs through independent innovation, introduction, digestion, absorption and innovation to develop electronic special equipment and instrument industry.

According to the "Revitalization of Equipment Manufacturing Industry" proposed by the 17th National Congress of the Communist Party of China and the "Several Opinions of the State Council on Accelerating the Revitalization of Equipment Manufacturing Industry" (Guo Fa [2006] No. 8) and the "Eleventh Five-Year Plan for Information Industry" The overall deployment, combined with the existing foundation and good development environment of the domestic electronic special equipment and instrument industry, in order to further promote the development of the equipment and instrument industry, the Ministry of Information Industry has specially prepared for the first time on the basis of in-depth research and extensive argumentation. "Eleven-five" special plan for electronic special equipment and instruments, as a guiding document for the development of China's electronic special equipment and instrument industry in the "Eleventh Five-Year Plan", to further strengthen and standardize industry management and guide the implementation of major projects in accordance with.

In order to facilitate the understanding of the plan inside and outside the industry and better implement the plan, the relevant contents of the "Special Plan" are as follows:

Electronic special equipment refers to equipment specially used in material preparation, component manufacturing and processing, machine assembly adjustment, process environment assurance, production process monitoring and product quality control in the process of research, development and production of various electronic information products. Mainly divided into semiconductor and integrated circuit production equipment, electronic components and electromechanical components production equipment, electric vacuum device production equipment, electronic machine assembly equipment, purification equipment, test equipment, electronic general equipment and electronic special tooling.

Based on electronic circuit technology, electronic instruments are combined with test and measurement technology, computer technology, communication technology, digital technology, software technology, bus technology, etc. to form a single or automatic test system. Through data acquisition, storage and processing, the amount of information to be measured is performed. Data display or graphic display, output information amount according to the needs of the measured object for system control. At present, the national standard divides electronic instruments into 25 categories, of which the first 20 are electronic measuring instruments and the last 5 are electronic applications.

In line with the principle of doing something different, to focus on the strength and achieve key breakthroughs, the "Special Plan" mainly involves semiconductor and integrated circuit special equipment, new display device special equipment, electronic whole machine assembly equipment, new electronic components. Four kinds of equipment fields and electronic measuring instruments with better development prospects such as special equipment.

I. Review on the Tenth Five-Year Plan

At present, there are more than 400 manufacturers of electronic special equipment and instruments in China. During the "10th Five-Year Plan" period, the domestic electronic special equipment and instrument industry developed rapidly, the industrial scale continued to expand, and some equipment and instruments have been able to meet domestic demand, and technological innovation has made new progress. According to the statistics of China Electronics Special Equipment Industry Association and China Electronic Instrument Industry Association, in 2005, China's electronic special equipment and instrument industry realized sales income of 4.49 billion yuan and 7.7 billion yuan, respectively, an increase of 14.9% and 37.5%. In the semiconductor and integrated circuit special equipment, 100nm high-density plasma etching machine, large-angle plasma injection machine has been initially industrialized, and step-by-step scanning lithography machine and a batch of 8-inch production line equipment have made important progress in research and development; In terms of device-specific equipment, domestic enterprises have been able to mass-produce TN/STN-LCD complete post-process equipment, some TN-STN pre-process equipment and some TFT-LCD post-process equipment. Domestic LED post-packaging equipment has accounted for 20% of the domestic market; In terms of new electronic components and special equipment, silk-type tape and other chip components and some lithium-ion battery devices have been successfully developed. Solar cell production equipment has been basically supplied and exported, and soft ferrite, hard ferrite and other production lines have been successfully developed. The market share of domestically produced equipment has reached 90%. The middle and low-end equipment has completely replaced the import and realized the export. The vacuum switch tube equipment has been supplied in line, and the technical level has reached the international advanced level. In the electronic whole machine assembly equipment, the medium and low-grade equipment Flow soldering machines, wave soldering machines, etc. have been partially supplied, and the development of wave soldering machines and reflow soldering machines for lead-free solders has also been achieved. In terms of electronic measuring instruments, the technical level of optical communication measuring instruments is close to the international advanced level, and some domestically produced instruments with high technical content such as TD-SCDMA network detectors have been successfully developed.

Despite the certain development of China's electronic special equipment and instrument industry during the 10th Five-Year Plan period, the industry scale is small, the concentration is low, the key basic technologies and equipment are weak in R&D and manufacturing capabilities, and the ability to introduce digestion and absorption is not strong, and it is competitive in the market. There are few enterprises, high dependence on foreign countries, lack of high-level technical talents, and restrictive factors such as imperfect policy environment for attracting foreign investment and promoting domestic industrial development.

Second, on the situation facing the "Eleventh Five-Year Plan"

The "Special Plan" comprehensively and objectively analyzes the situation facing the development of China's electronic special equipment and instrument industry during the "Eleventh Five-Year Plan" period from three aspects: market demand, technology development trend and environment facing industrial development.

(1) Market analysis

The market for electronic equipment and instruments varies with industry fluctuations. Before 2000, the global market for electronic equipment and instruments maintained steady growth. In 2001, the market experienced a sharp decline. Since then, it has steadily rebounded. In 2004, it basically recovered to the level of 2000. The market size reached 135 billion US dollars, accounting for 6.84% of the total electronic information product market. In the next few years, with the further expansion of the global electronic information industry, it is expected that the demand for special equipment and instruments will maintain steady growth, and the growth rate will be basically consistent with the previous decade. In 2010, the market size will reach 170 billion US dollars, with an average annual rate. Growth of 3.5%.

In recent years, international IT companies have moved their production bases to China. China has become a global manufacturing base for electronic information products, which has led to a significant increase in demand for domestic electronic equipment and instruments. Contrary to the fluctuations in the global market for electronic equipment and instruments, the Chinese market has maintained rapid growth. In 2005, the market reached 110 billion yuan. During the “Eleventh Five-Year Plan” period, with the further expansion of the domestic electronic information industry, the upgrading of equipment and instruments will accelerate, and the market scale of electronic special equipment and instruments will continue to grow rapidly. It is expected that during the “Eleventh Five-Year Plan” period, domestic electronic special equipment and The growth rate of the instrument market will reach 15-20%. In 2010, the market scale will be 2000-250 billion yuan. The development of special equipment and instrument industry faces a good market prospect.

(2) Technology trends

Electronic special equipment and instruments combine software, precision electronics, machinery, chemistry, chemical, physics, materials, automation, optoelectronics, components and other multidisciplinary technologies. They are the product of the integration of basic research and applied research, and are the national science and technology level. The concentrated expression of independent innovation capability, its technology and product update speed is significantly higher than other industries. On the one hand, electronic special equipment and instruments should provide more advanced and efficient technical means for the manufacture and testing of electronic information products; on the other hand, digitalization, high precision, integration, and intelligence have become the inevitable development of electronic special equipment and instruments. The trend itself needs to be continuously upgraded.

In terms of electronic special equipment technology, in order to seize the commanding heights of market competition, shorten the product launch cycle, meet the needs of new products and new process technologies, the industry development is increasingly demanding equipment manufacturers, electronic special equipment and product manufacturing processes, software development The combination is getting closer and closer, and equipment manufacturers must not only provide hardware equipment to customers, but also continue to provide comprehensive solutions and full service. In the field of semiconductor and integrated circuit special equipment, the chip manufacturing industry requires equipment to meet the process requirements of large diameter, thin line width and ultra-thin film of 12 inches and above. The equipment tends to be integrated and the production line is automated. The equipment manufacturing and semiconductor integrated circuit technology are coming. The more inseparable, the constant pursuit of comprehensive solutions, full-service; in the field of new electronic components and equipment, electronic components while maintaining miniaturization, to modular, modular, multi-functional, passive / active components Integrated development, new chip component special equipment must constantly meet the development requirements of its production process, relying on advanced precision manufacturing technology and high automation technology, to the direction of systemization, integration, intelligence, agility, green Development; in the field of special equipment for flat panel display devices such as TFT-LCD and PDP, in order to improve the utilization rate of raw materials and reduce production costs, production equipment tends to increase in processing size, fineness, integration, automation, and product and process integration. Continuous improvement; in the field of LED special equipment, equipment production efficiency and automation process The degree is increasing, and there are more and more online detection devices. In the field of SMT special equipment, with the development of miniaturization, integration and multi-function, electronic components are also becoming more miniaturized, integrated and more. The development of functions has promoted the development of SMT equipment to a multi-functional, flexible integrated system. At the same time, with the increasingly urgent requirements of global lead-free, lead-free wave soldering machines, lead-free reflow soldering machines, and lead-free AOI equipment has gradually become the mainstream of development. It is expected that the electronic whole machine assembly equipment will be fully lead-free at the end of the “Eleventh Five-Year Plan”.

In terms of electronic measuring instrument technology, with the continuous pursuit of testing automation, networking, high efficiency, high reliability, and friendly interface, the trend of integration of electronic testing technology with communication and computer technology is becoming more and more obvious. Software technology is The proportion of electronic testing technology is getting heavier and heavier. With the improvement of the standardization level of the whole machine technology, the whole machine test instrument is further developed towards functional modularization and integration. The emergence of new digital consumer electronics products has led to the continuous evolution of digital test instruments and general-purpose test instruments in the direction of high speed and real-time; with the advent of new components and new materials, UHF, high-power, low-noise integrated circuits In-depth application, the test performance of electronic measuring instruments is rapidly increasing, the uncertainty affecting the measurement accuracy is getting smaller and smaller, and the measurement is constantly approaching its physical limit - true value.

(3) The environment facing industrial development

At present, the information industry has become the first pillar industry of China's national economy and has formed a relatively complete industrial chain, but it is still in the middle and low end of the international division of labor, especially represented by software, integrated circuits, electronic special equipment and instruments. There is a big gap between the core basic industries and developed countries. To realize the transformation of the electronic information industry to innovation and efficiency, and truly embark on the road of independent development, we must accelerate the development of electronic special equipment and instrument industry during the 11th Five-Year Plan period. With the development of China's national economy, the enhancement of industrial base, and the increase of overseas technical resources, it is entirely possible to improve the supporting capacity of domestically produced equipment by the end of the "Eleventh Five-Year Plan" and that some key equipments are close to the international advanced level.

During the “Eleventh Five-Year Plan” period, with the rapid development of the domestic information industry and the pragmatic advancement of information construction, digital TV, next-generation mobile communication, and next-generation Internet industrialization are accelerating, market applications are maturing, integrated circuits and new displays. The further expansion of the production scale of the device and the upgrading of the production process have created a broad market space for the development of the domestic electronic special equipment and instrument industry.

The report of the 17th National Congress of the Communist Party of China clearly stated that it is necessary to "revitalize the equipment manufacturing industry." The State Council promulgated the "Several Opinions of the State Council on Accelerating the Revitalization of the Equipment Manufacturing Industry" and the "Eleventh Five-Year Plan for the Information Industry" will use the electronic equipment and equipment industry. As a development focus, the National Informatization Development Strategy 2006-2020 lists key process equipment as one of the key points of China's informatization development. The National Medium- and Long-Term Science and Technology Plan lists large-scale integrated circuit manufacturing equipment and complete sets of processes as The national science and technology major projects, these measures show the country's determination to develop electronic special equipment and instrument industry, and also create favorable conditions for the development of electronic special equipment and instrument industry from the policy.

Third, on development ideas and goals

Based on the summary of the existing foundations of the electronic special equipment and instrument industry, the “Special Plan” puts forward the following development ideas and objectives for the analysis of market demand, technology development trends and development environment during the “Eleventh Five-Year Plan” period.

(1) Development ideas

The "Special Plan" proposes a core idea of ​​strengthening international cooperation, strengthening research on common basic technologies, breaking through key technologies, and narrowing the gap with international advanced levels. The starting point is concentrated in three aspects: First, China's electronic special equipment and instrument industry has a weak technical foundation, insufficient independent innovation capability, and a clear gap with the international advanced level, which determines that China must focus on increasing international development in the process of developing the industry. Cooperation, through the introduction of digestion and absorption and cooperative development to enhance the level of industrial technology, training a group of high-quality talent. Secondly, as a comprehensive industry integrating many disciplines, the electronic special equipment and instrument manufacturing industry has a strong foundation and a high degree of relevance. To accelerate industrial development, it is necessary to strengthen the research on common basic technologies and continuously increase investment. Third, we must adhere to the principle of "doing something, do something wrong", seize some areas where the domestic industrial base is relatively good, and the market demand is large, concentrate our efforts, strive to master some key technologies, and have some independent intellectual property rights. Reduce the gap with international advanced technology.

The "Special Plan" proposes to take the development of emerging industries as an opportunity to drive the development of electronic special equipment and instrument industry. Emerging industries such as digital TV, next-generation mobile communication and next-generation Internet have a good technical foundation and broad market prospects. They are currently in a critical period of product and technology upgrading and flourishing. New production processes and technical requirements are The development of special equipment and instruments has created new opportunities for development. Grasping the opportunity to combine the development, industrialization and standardization of digital TV, next-generation mobile communication and next-generation Internet with the development of corresponding special equipment and instruments, and promote the combination of production and use, it is entirely possible to achieve breakthroughs in key areas. This has been well verified in the industrialization of TD-SCDMA.

The "Special Plan" emphasizes the development of strategic technical equipment and encourages the development of specialized equipment and instruments. Integrated circuits and flat panel display devices are strategic industries that reflect the future development level of the electronic information industry. China's development of such industries is also facing the limitations of international advanced countries in the procurement of technology, equipment and components, and related electronic special equipment. As the development focus, the instrument industry aims to strengthen policy guidance, increase investment, create an environment more conducive to industrial development, and promote the breakthrough of strategic industries with the prosperity and development of electronic special equipment and instrument industry. New electronic component special equipment, surface mount and complete machine-mounted equipment supporting lead-free technology, and electronic measuring instruments are the foundation and core of electronic components and complete machine development and manufacturing. Today, the rapid development of China's information industry The market prospects are also very broad. China should strengthen its guidance on the basis of existing industries, continuously increase investment, enhance product levels and competitiveness, and strive to achieve that some products can meet the needs of the domestic market and gradually replace imports.

(II) Development goals

According to the industrial development ideas, on the basis of comprehensive analysis of domestic and international market demand and technological development, the "Special Plan" elaborates the development goals of the electronic special equipment and instrument industry from the aspects of industrial development and technological innovation.

Industry development goals. The "Special Plan" proposes growth targets and domestic market share targets for electronic special equipment and instruments. During the "10th Five-Year Plan" period, the annual average compound growth rate of China's electronic special equipment industry scale is about 17%. Considering that the scale of the domestic electronic information industry will be further expanded during the "Eleventh Five-Year Plan", the "Special Plan" proposes the scale of the electronic special equipment industry. It will maintain its development goal of 25% annual growth rate. Compared with equipment, the replacement rate of electronic measuring instruments is relatively low. The “Special Plan” proposes the development goal of the annual growth of the domestic electronic measuring instrument industry in the “Eleventh Five-Year Plan” period by 20%. At present, the market share of domestically produced electronic special equipment and instruments is still less than 10%. With the introduction and implementation of national industrial policies, key technologies of major equipment and instruments, and low-cost advantages of domestically produced equipment and instruments, it is expected that During the period, the domestic electronic special equipment and instrument industry will show a rapid development trend. By 2010, the domestic market share of domestic equipment and instruments is expected to exceed 20%.

Technological innovation goals. Based on the development status of China's electronic special equipment and instrument industry, the "Special Plan" puts forward technical innovation targets for production equipment and electronic measuring instruments in strategic fields such as integrated circuits and flat panel display devices. In the semiconductor and integrated circuit special equipment, after long-term efforts, China has a certain R & D basis in the field of key equipment such as lithography machine, etching machine, ion implanter, etc., through the implementation of national industrial policies, major special support and state-owned The joint efforts of relevant units will achieve the on-line use of 12-inch production equipment by 2010, and it is possible to meet the domestic market demand for 8-inch back-end production equipment. In the field of special equipment for flat panel display devices, the front-end equipment has a complicated production process, technical difficulties, and a weak domestic industrial base. However, in terms of back-end equipment, China Electronics Technology Group 2nd and 45th Research Institute, Qixing Huachuang and other companies have been able to provide a complete system integration solution for some TFT-LCD post-process equipment and TN/STN-LCD post-process. On the basis of the special support of the national flat panel display device, the development policy of the flat panel display device industry is encouraged and implemented. By 2010, the back-end equipment of the flat panel display device will be basically based on the domestic market. In the field of electronic measuring instruments, due to the small scale of existing industries, weak supporting technologies and industries, lack of talents, insufficient investment, lack of core technologies and independent intellectual property rights, the “Special Plan” proposes “preliminarily master some core technologies”. Technological innovation goals.



Fourth, on key tasks

(1) Electronic special equipment

——Special equipment for semiconductors and integrated circuits

Semiconductor and integrated circuit special equipment refers to special equipment for manufacturing various semiconductor devices and integrated circuits, including wafer preparation, mask preparation, chip manufacturing, package testing, on-line process inspection, ultra-clean equipment and special tooling, and is electronic Among the special equipments with the highest technical content and value and the widest application, the key equipment involves a wide range of professional disciplines and has high manufacturing difficulty. Semiconductor and integrated circuit-specific devices occupy an important position in electronic special equipment, and their sales account for about 20% of the total sales of electronic special equipment.

China's government and industry attach great importance to the development of special equipment for semiconductors and integrated circuits. Through national special support, creating an environment to attract overseas talents to invest and start businesses, and constantly improving the industrial development environment, the 45th and 48th research institutes of China Electronics Technology Group have emerged. Qixing Huachuang, Wuxi Suntech and other key enterprises with certain strength and development potential have certain industry and technology bases in the front and rear process production equipment, material preparation equipment, testing equipment, etc. "Planning" focuses on the development of 12-inch integrated circuit production lines, the construction of more than 5 12-inch, 90-nanometer chip production lines; the development of 10 8-inch 0.13-0.11 micron chip production lines", "Professional Planning" proposed to focus on development 8- 12-inch integrated circuit key production equipment, such as lithography equipment, etching equipment and other chip manufacturing equipment, bonding equipment, dicing machine and other packaging equipment and special molds. At the same time, considering the unique technological advantages and application fields of compound semiconductors, it is an important material for new semiconductor devices. The "Special Plan" proposes to actively track compound semiconductor technology and accelerate the fabrication of compound semiconductors (GaAs, InP, GaN, SiC, etc.). R&D and industrialization.

——New display device special equipment

The new display device special equipment mainly refers to flat panel display device (FPD) production equipment, FPD mainly includes LCD (liquid crystal display device), LED (light emitting diode), PDP (plasma display device), OLED (organic electroluminescent diode), VFD (Vacuum fluorescent display device) and FED (Field Emission Display Device) and the like.

According to the “Eleventh Five-Year Plan” of the information industry, the “Eleventh Five-Year” special plan for electronic basic materials and key components, “Developing the development of new flat panel display device industries such as independent TFT-LCD and PDP”, “by 2010, a relatively complete system will be established. The new display device production system, the industry chain is basically complete, the new display device industry scale reaches 250 billion yuan, and has strong international competitiveness." Considering the end of the "Eleventh Five-Year Plan", the global TFT-LCD, PDP and other flat panels are expected. The market demand for display devices will exceed 100 billion US dollars. The "Special Plan" proposes to first break through the TFT-LCD production equipment with great market potential during the "Eleventh Five-Year Plan" period, and actively carry out research on front-end process equipment such as panel production line arrays and box-forming. Development, focusing on improving the development level of wet/dry etching machine, liquid crystal filling machine, etc., forming the matching capability of TFT-LCD transfer and cleaning equipment. As the flat panel display technology is currently in a competitive landscape, the "Special Plan" proposes to develop TFT-LCD equipment, but also to strengthen the development and production of key production equipment for high-brightness LED, PDP and OLED and other new flat panel display devices. Provide support for the development of next-generation flat panel display technologies and products.

——Electronic machine assembly equipment

The electronic whole machine assembly equipment includes surface mount (SMT) equipment, through hole insertion (THT) equipment, welding equipment, cleaning equipment, complete assembly line, production transmission line, and parts processing and shaping equipment.

With the global electronic information product machine manufacturing industry shifting production capacity to China, electronic electronic products such as consumer electronics, computers and peripherals, communication systems and terminal products are produced to fully automatic precision placement machines, precision printing machines, instrumentation machines, and automatic The demand for electronic whole machine-mounted equipment such as optical inspection equipment (AOI) has grown rapidly. To this end, we must further increase investment in research and development of such equipment, actively promote industrialization, and continuously expand market share. At the same time, with the increasingly strict requirements for environmental protection at home and abroad, the European Union has implemented the "Directive on the Restriction of the Use of Certain Hazardous Materials in Electrical and Electronic Equipment" (ROHS Directive) in 2006 to meet the industry's lead-free equipment. We should attach great importance to the development and industrialization of surface mount equipment that is suitable for lead-free processes.

——New equipment for electronic components

The special equipment for electronic components mainly includes surface mount components (SMC/SMD), sensitive components, sensors, high-frequency frequency devices, green power supplies and other production equipment.

During the “Eleventh Five-Year Plan” period, the demand for electronic components and materials has further increased due to the upgrading of electronic whole machine products, and higher requirements have been put forward for the development of electronic components and materials industry. It is estimated that by 2010, the domestic electronic components market will reach 2.9 trillion yuan, and new components will be developed in the direction of miniaturization, chip, high performance, integration, intelligence, environmental protection and energy conservation. Micro-small and chip-based technologies, passive integration technologies, and green production technologies have become the focus of technological advancement in the industry. Microelectromechanical systems (MEMS) and micro-assembly technologies are rapidly developing. To this end, the "Special Plan" proposes to focus on the development of chip components, new green batteries, new printed circuit boards, and other large-scale new component production equipment, high-frequency frequency device production equipment, MEMS production equipment and electronic special workers. Moulds and high-precision molds provide the necessary equipment support for the rapid development of the electronic components industry.

(2) Electronic measuring instruments

Electronic measuring instruments mainly include general measuring instruments, electronic basic measuring instruments and integrated measuring instruments, communication, broadcasting and television, application electronics and other professional measuring instruments.

According to the development of the industry's "Eleventh Five-Year Plan", combined with the rapid development of core integrated industries such as domestic integrated circuits, new display devices, and new electronic components, the new generation of mobile communication industry is booming, and the digitalization process of radio and television is accelerating. "Proposed to accelerate the development of integrated circuit measuring instruments, new display devices, new electronic components and other electronic basic measuring instruments, as well as a new generation of mobile communications, digital television and other measuring instruments. At the same time, in order to meet the needs of the industry's continuous development, to provide support for industrial common and basic technology research, we must actively develop high-performance general-purpose measuring instruments.

V. About policy measures

In order to ensure the smooth realization of China's electronic special equipment and instrument industry development goals during the 11th Five-Year Plan period, the "Special Plan" proposes from the aspects of creating a good policy environment, increasing financial support, actively introducing foreign investment and increasing international cooperation. Policy recommendations. Specific measures include: actively implementing the existing industrial policies such as the State Council's Opinions on Accelerating the Revitalization of the Equipment Manufacturing Industry and the State Council on Implementing Certain Supporting Policies, and timely revising the Catalogue of Industrial Structure Adjustment Guidance, and increasing the national capital investment. Tax incentives, financial support, government procurement priorities, encourage the introduction of digestion, absorption and innovation, and further create a good policy environment and promote industrial development. At the same time, it is necessary to revise the "Guidance Catalogue for Foreign Investment Industries", adjust tariff policies and other measures to create an enabling environment for internationally superior enterprises to invest in China, continuously increase international cooperation, and gradually improve industrial technology and competitiveness.

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