EDWARDS Announces New Vacuum Pump for LED and Compound Semiconductor Manufacturing
On July 3, Clayley, West Sussex, UK, the world's leading manufacturer of high-precision vacuum equipment and exhaust gas treatment systems and the corresponding value-added service provider Edwards announced the launch of the new iXH645H dry pump, the new equipment is optimized, Suitable for MOCVD processes used in LED fabrication, and compound semiconductor fabrication processes using III-V materials in gate stacks.
The iXH645H offers very high airflow and is capable of continuous operation at the high loads required by the latest generation of LED manufacturing equipment. The iXH series of dry pumps use advanced technology to minimize maintenance requirements and maximize uptime, helping to reduce costs.
LED and compound semiconductor manufacturing processes typically use high flow helium and highly corrosive ammonia. The iXH645H has been designed to meet these requirements, with excellent hydrogen evacuation and corrosion resistant design, including a patented nitrogen purge barrier that protects pump seals. The XH645 pump has high temperature capability to help prevent possible condensation of phosphorus compounds.
In addition, the iXH645H dry pump's advanced oil lubrication and sealing technology eliminates the need for regular maintenance, while its heat dissipation and motor design prevent overheating, motor overload or limited work area. The optimized temperature control system of the iXH645H pump ensures that the pump is ready for the process in approximately 30 minutes of start-up time.
The iXH645H offers very high airflow and is capable of continuous operation at the high loads required by the latest generation of LED manufacturing equipment. The iXH series of dry pumps use advanced technology to minimize maintenance requirements and maximize uptime, helping to reduce costs.
LED and compound semiconductor manufacturing processes typically use high flow helium and highly corrosive ammonia. The iXH645H has been designed to meet these requirements, with excellent hydrogen evacuation and corrosion resistant design, including a patented nitrogen purge barrier that protects pump seals. The XH645 pump has high temperature capability to help prevent possible condensation of phosphorus compounds.
In addition, the iXH645H dry pump's advanced oil lubrication and sealing technology eliminates the need for regular maintenance, while its heat dissipation and motor design prevent overheating, motor overload or limited work area. The optimized temperature control system of the iXH645H pump ensures that the pump is ready for the process in approximately 30 minutes of start-up time.
Fiber Optic Box,Fiber Optics Box,Fiber Optic Boxes,Fiber Optic Junction Box
Cixi Dani Plastic Products Co.,Ltd , https://www.danifiberoptic.com